Floors

Use antistatic flooring materials with a surface resistance of 1x10⁵ to 1x10¹⁰Ω or antistatic mats

Bench tops

Use work surfaces with a surface resistance of 1x10⁵ to 1x10¹⁰Ω

Chairs

Use chairs with a resistance to ground of 1x10⁵ to 1x10⁸Ω

Carts 
(When carrying products without static electricity protection)

Wafer charge voltage: Use of 
carts with charge voltage 
controlled to less than ±300V

Apply antistatic mats to shelves and ground to floor 
(resistance to ground of 1x10⁵ to 1x10¹⁰Ω)

Storage shelves

Store wafers in box. Shelves 
are either grounded or have 
charge voltage of less than 
20kV.

Use grounded shelves with a surface resistance of 1x10⁵ to 1x10¹⁰Ω

Work clothes, 
dust proof clothes

Wear antistatic clothes with surface resistance of 1x10⁵ to 1x10¹¹Ω

Shoes

Antistatic shoes that meet the following specification: Surface resistance of 1x10⁵ to 1x10¹⁰Ω

Wrist strap

-

Straps that meet the following specification: Resistance to 
ground of 1x10⁵ to 1x10⁷Ω

Finger stalls

-

Use stalls that meet the following specification: Surface 
resistance of 1x10⁵ to 1x10¹⁰Ω

Gloves

Use gloves made from materials that are charge resistant. Surface resistance of 1x10⁵ to 1x10¹¹Ω

Equipment

For electrically powered equipment, use grounded equipment